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Energy-saving

Energy-saving innovation injects sustainable kinetic energy into manufacturing

  • Exposure machine

Energy-saving air conditioner (Eco-tcon)

Application areas:
Semiconductor manufacturing and panel manufacturing exposure machines

Applicable models:
Japanese: C Company, H Company, N Company, O Company
American: U Company, S Company

Functional effects:
Energy saving > 60%
Reduce maintenance time and costs
Avoid unexpected crashes

  • Vacuum machine

Energy-saving ice machine (Eco-cooling)

Vacuum equipment suitable for semiconductor manufacturing and photovoltaic panel manufacturing

Applicable models:

  • CVD
  • Dry Etch
  • Descum
Manufacturer Cosma Eco Cooling
Introduction results
121 units (March 2023~)*
System patent
4 articles (2023/3~)*
Transformation method
Plug-in patent*
Standard function: one-key recovery
Quick switch between original system and energy-saving system
Standard function: temperature control system
Heat chasing system replaces heater
Optional function: Recipe Control
Yes, can handle multiple processes
Maintenance costs
No consumables
Compressor & Heater Energy Saving Benefits
~100%

eCR-20
(Eco Chiller)

  • Patented technology x high efficiency and energy saving x intelligent temperature control

Energy-saving ice machine (eCR)

Specifications:

Temperature setting range: 25～80℃
Temperature accuracy: ±0.5°C (cooling outlet)
Cooling capacity: 17.16 kW
Heater power: 2 KW
Water tank capacity: 3 liters
Pump specifications: Maximum head 21 meters, maximum flow rate 58 liters/minute
Dimensions: 650mm wide × 650mm deep × 1400mm high (mm)
Weight: 100 kg ± 10%
Cooling water (PCW): 18±1°C, flow rate 20-50 liters/minute
Power requirements: Single-phase 208V, 50/60Hz, 9A/2 KVA

Product Application:

  • Exposure equipment
  • Etching equipment
  • Chemical Vapor Deposition (CVD) Equipment

Features:

  • Multiple patented technologies
  • Energy-saving operation design
  • High-precision temperature control
  • Modular design for easy maintenance and expansion
  • Multiple protection mechanism design
Power Consumption Comparison (Chiller vs. eCR)
project
Chiller
eCR
compressor
100%
X
heater
100%
70%
pump
100%
100%
total
100%
50%

A: Side-mounted Eco-SCT

B: Integrated Eco-SCT

Energy-saving clean air conditioner (Eco-sct)

Applicable to: Semiconductor exposure machine
Function : AMC Removal + Temperature Control

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Let us create the most suitable energy-saving solution for your process

Whether you're evaluating equipment upgrades, implementing energy-saving systems, or seeking customized process improvement solutions, the Coresemi team is happy to discuss your needs. We provide technical explanations, benefit assessments, and on-site consulting services to help you find the product combination that best meets your needs.

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Committed to energy conservation, cleanliness and intelligent manufacturing, Cosma is your trusted technology partner.

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